Lianke Semiconductor 8-Inch/12-Inch Sic Resistor Furnace And Process Technology Have Made Breakthroughs

On April 27, the China Nonferrous Metals Industry Association organized a scientific and technological achievement evaluation meeting in Wuxi.An expert group consisting of Academician Chu Junhao of the Institute of Technology and Physics of the Chinese Academy of Sciences, Professor Zhou Qigang of Youyan Technology Group, and five experts from Southeast University, Nanjing University of Aeronautics and Astronautics, Zhejiang University Science and Technology Innovation Center, etc., evaluated the two scientific and technological achievements completed by Lianke Semiconductor Co., Ltd. and other units.

Dr. Hu Dynamic reported that the expert group of the silicon carbide resistance furnace project unanimously agreed that the 8-inch/12-inch silicon carbide resistance furnace and process complete technology project, in conjunction with Zhejiang University and other units, launched the DC dual-power heater and dual-temperature zone thermal field structure for the first time in the industry, with the heating power dropping by 35% to 28Kw; developed high-precision control software to achieve accurate control of gas flow and pressure, and meet the stable growth of 8-inch/12-inch SiC single crystal, with high technical difficulty and high complexity.After the promotion and application of several silicon carbide substrate companies, the economic and social benefits have been significant, helping customers grow 8-inch/12-inch silicon carbide crystals with a thickness of more than 5cm.The overall technology of the project has reached the international leading level.

The 8-inch zone furnace project reports the complete technical project of the 200mm zone melting silicon single crystal furnace. It has created the technology of the lower spindle and the sealed lining driven by a servo motor and controlled synchronously, as well as a new control idea for measuring melt flow by the second camera, and overcomes the problems of high-precision machining and assembly of the spindle.A full-chain technical system of key technologies - prototype demonstration - industrial application has been formed.The technology is difficult and complex.The project technology has been successfully put into production and operated stably at Youyan Semiconductor Silicon Materials Co., Ltd., with good technical reproducibility and high maturity.The overall technology of the project has reached the international leading level.

Group photo by members of the expert group Lianke Semiconductor Co., Ltd. has been committed to the research and development and manufacturing of semiconductor equipment since its establishment. Many achievements are at the advanced level in the industry and have won the first Tianyue Outstanding Supplier and SEMI Sustainable Development Outstanding Contribution Award.The two scientific and technological achievements have been awarded internationally leading appraisal, which is a high recognition of the company's R&D strength and technical level.Source: Lianke Semiconductor Official Micro